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MEMS device and method of forming MEMS device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS device and method of forming MEMS device

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS device and methods for manufacturing thereof, light...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS device for an adaptive optics mirror

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS device for spacecraft thermal control applications

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS device having a recessed cavity and methods therefor

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS device having contact and standoff bumps and related...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS device with an angular vertical comb actuator

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMs device with feedback control

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMs device with feedback control

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS devices and processes for packaging such devices

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS devices having improved uniformity and methods for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS devices with increased damping for suspended movable...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS devices with unreleased thin film components

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS display

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS display

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS display

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS display devices and methods of fabricating the same

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS driver

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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MEMS driver

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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