MEMS device with an angular vertical comb actuator

Details MEMS device with an angular vertical comb actuator MEMS device with an angular vertical comb actuator

2008-03-06

2010-10-19

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S199200, C359S198100, C359S224100, C359S225100, C073S504120, C073S504160, C216S002000, C216S024000

Reexamination Certificate

active

07817331

ABSTRACT:
A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.

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Patterson et al, “A Scanning Micromirror with Angular Comb Drive Actuation”, Proceedings of the IEEE 15thAnnual International Conf. on Microelectro Mechanical Systems, MEMS 2002, Las Vegas, NV, Jan. 20-24, 2002; IEEE International Micro Electro Mechanical Systems Conf. New York, NY: IEEE, US, vol. Conf. 15, 2002, pp. 544-547 XP010577713.

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