Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-09-05
2006-09-05
Dang, Hung Xuan (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S566000
Reexamination Certificate
active
07102808
ABSTRACT:
The present invention provides a MEMS device and methods for manufacturing thereof, in which planarizing the surface of a beam and improving performance of the MEMS device are aimed. In addition, the present invention provides a light modulation device and a GLV device in which this MEMS device is used, and methods for manufacturing thereof; and further, a laser display using this GLV device. According to the present invention, a MEMS device includes a substrate side electrode and a beam that is disposed so as to oppose the substrate side electrode and is driven by electrostatic attraction force or electrostatic repulsion force that acts between the substrate side electrode and the driving side electrode, with the substrate side electrode being formed of a single-crystalline semiconductor layer.
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Dang Hung Xuan
Kananen Ronald P.
Rader & Fishman & Grauer, PLLC
Sony Corporation
Tra Tuyen
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