Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-07-12
2005-07-12
Epps, Georgia (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S292000, C359S295000, C359S224200, C427S162000, C427S534000, C438S024000, C438S048000, C438S599000, C438S691000, C438S734000
Reexamination Certificate
active
06917459
ABSTRACT:
A method of forming a MEMS device includes providing a substructure including a base material and at least one conductive layer formed on a first side of the base material, forming a dielectric layer over the at least one conductive layer of the substructure, forming a protective layer over the dielectric layer, defining an electrical contact area for the MEMS device on the protective layer, and forming an opening within the electrical contact area through the protective layer and the dielectric layer to the at least one conductive layer of the substructure.
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Bengali Sadiq
Monroe Michael G.
Nikkel Eric L.
Potochnik Stephen J
Szepesi Mickey
Dinh Jack
Epps Georgia
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