MEMS devices with unreleased thin film components

Details MEMS devices with unreleased thin film components MEMS devices with unreleased thin film components

2006-03-14

2006-03-14

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S254000

Reexamination Certificate

active

07012726

ABSTRACT:
In one embodiment, the invention provides a MEMS device. The MEMS device comprises a plurality of functional components including at least one moveable component; and a sacrificial component to at least reduce movement of the moveable component during shipping of the microelectromechanical systems device, wherein the sacrificial component can be removed after shipping.

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