MEMs device with feedback control

Details MEMs device with feedback control MEMs device with feedback control

2007-01-02

2007-01-02

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

11278761

ABSTRACT:
A MEMS device includes at least one movable member and an active device having at least one property affected by the location of the movable member with respect to the active device. A control circuit is used to limit movement of the movable member based on observation of the property affected by the active device.

REFERENCES:
patent: 6078395 (2000-06-01), Jourdain et al.
patent: 6242324 (2001-06-01), Kub et al.
patent: 2001/0055147 (2001-12-01), Little et al.
patent: 2003/0116711 (2003-06-01), Hara et al.
patent: 2003/0117690 (2003-06-01), Oda et al.
patent: 2004/0052113 (2004-03-01), Diorio et al.
patent: 2004/0061925 (2004-04-01), Azarov et al.
patent: 2004/0184717 (2004-09-01), Koontz et al.

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