MEMS devices and processes for packaging such devices

Details MEMS devices and processes for packaging such devices MEMS devices and processes for packaging such devices

2007-04-12

2010-06-29

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S292000

Reexamination Certificate

active

07746537

ABSTRACT:
A package structure and method of packaging for a MEMS device is described. A transparent substrate having an interferometric modulator array formed thereon is shown. A single or dual-layered backplate is joined to the transparent substrate with a seal. The interferometric modulator array may be exposed to the surrounding environment through an opening in either the backplate or the seal.

REFERENCES:
patent: 4036360 (1977-07-01), Deffeyes
patent: 4074480 (1978-02-01), Burton
patent: 4310220 (1982-01-01), Kuwagaki et al.
patent: 4383255 (1983-05-01), Grandjean et al.
patent: 4459182 (1984-07-01), te Velde
patent: 4531126 (1985-07-01), Sadones
patent: 4844614 (1989-07-01), Henderson et al.
patent: 4956619 (1990-09-01), Hornbeck
patent: 5018256 (1991-05-01), Hornbeck
patent: 5099353 (1992-03-01), Hornbeck
patent: 5216537 (1993-06-01), Hornbeck
patent: 5244707 (1993-09-01), Shores
patent: 5268533 (1993-12-01), Kovacs et al.
patent: 5304419 (1994-04-01), Shores
patent: 5331454 (1994-07-01), Hornbeck
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5591379 (1997-01-01), Shores
patent: 5610438 (1997-03-01), Wallace et al.
patent: 5614785 (1997-03-01), Wallace et al.
patent: 5717476 (1998-02-01), Kanezawa
patent: 5771321 (1998-06-01), Stern
patent: 5784189 (1998-07-01), Bozler et al.
patent: 5835255 (1998-11-01), Miles
patent: 5837562 (1998-11-01), Cho
patent: 5853662 (1998-12-01), Watanabe
patent: 5856820 (1999-01-01), Weigers et al.
patent: 5882761 (1999-03-01), Kawami et al.
patent: 5936758 (1999-08-01), Fisher et al.
patent: 5939785 (1999-08-01), Klonis et al.
patent: 5959763 (1999-09-01), Bozler et al.
patent: 5986796 (1999-11-01), Miles
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6040937 (2000-03-01), Miles
patent: 6055090 (2000-04-01), Miles
patent: 6107115 (2000-08-01), Atobe et al.
patent: 6120339 (2000-09-01), Alwan
patent: 6127765 (2000-10-01), Fushinobu
patent: 6195196 (2001-02-01), Kimura et al.
patent: 6238755 (2001-05-01), Harvey et al.
patent: 6261853 (2001-07-01), Howell et al.
patent: 6303986 (2001-10-01), Shook
patent: 6365229 (2002-04-01), Robbins
patent: 6379988 (2002-04-01), Peterson et al.
patent: 6426124 (2002-07-01), Olster et al.
patent: 6426461 (2002-07-01), Ginter et al.
patent: 6445062 (2002-09-01), Honda
patent: 6447126 (2002-09-01), Hornbeck
patent: 6455927 (2002-09-01), Glenn et al.
patent: 6462392 (2002-10-01), Pinter et al.
patent: 6465355 (2002-10-01), Horsley
patent: 6466354 (2002-10-01), Gudeman
patent: 6472739 (2002-10-01), Wood et al.
patent: 6489670 (2002-12-01), Peterson et al.
patent: 6495895 (2002-12-01), Peterson et al.
patent: 6507385 (2003-01-01), Nishiyama et al.
patent: 6525416 (2003-02-01), Hauser et al.
patent: 6538312 (2003-03-01), Peterson et al.
patent: 6558820 (2003-05-01), Raychaudhuri et al.
patent: 6583921 (2003-06-01), Nelson
patent: 6589625 (2003-07-01), Kothari et al.
patent: 6603182 (2003-08-01), Low et al.
patent: 6650455 (2003-11-01), Miles
patent: 6661084 (2003-12-01), Peterson et al.
patent: 6674159 (2004-01-01), Peterson et al.
patent: 6674562 (2004-01-01), Miles et al.
patent: 6680792 (2004-01-01), Miles
patent: 6690444 (2004-02-01), Wilkinson et al.
patent: 6743656 (2004-06-01), Orcutt et al.
patent: 6778046 (2004-08-01), Stafford et al.
patent: 6779260 (2004-08-01), Brandenburg et al.
patent: 6791660 (2004-09-01), Hayashi et al.
patent: 6833668 (2004-12-01), Yamada et al.
patent: 6838309 (2005-01-01), McCann
patent: 6843936 (2005-01-01), Jacobs
patent: 6867896 (2005-03-01), Miles
patent: 6872984 (2005-03-01), Leung
patent: 6882458 (2005-04-01), Lin et al.
patent: 6882480 (2005-04-01), Yanagisawa
patent: 6914245 (2005-07-01), Sone et al.
patent: 6947200 (2005-09-01), Huibers
patent: 6995890 (2006-02-01), Lin
patent: 6999225 (2006-02-01), Lin et al.
patent: 7015885 (2006-03-01), Novotny et al.
patent: 7019458 (2006-03-01), Yoneda
patent: 7034984 (2006-04-01), Pan et al.
patent: 7042643 (2006-05-01), Miles
patent: 7046374 (2006-05-01), Barbarossa
patent: 7060895 (2006-06-01), Kothari et al.
patent: 7123216 (2006-10-01), Miles
patent: 7126741 (2006-10-01), Wagner et al.
patent: 7161728 (2007-01-01), Sampsell et al.
patent: 7164520 (2007-01-01), Palmateer et al.
patent: 7184202 (2007-02-01), Miles et al.
patent: 7218438 (2007-05-01), Przybyla et al.
patent: 7259449 (2007-08-01), Floyd
patent: 7282393 (2007-10-01), Tarn
patent: 7307776 (2007-12-01), Miles et al.
patent: 7456497 (2008-11-01), Higashi
patent: 7517712 (2009-04-01), Stark
patent: 7518775 (2009-04-01), Miles et al.
patent: 2001/0004085 (2001-06-01), Gueissaz
patent: 2001/0055146 (2001-12-01), Atobe et al.
patent: 2002/0012364 (2002-01-01), Kalian et al.
patent: 2002/0043706 (2002-04-01), Jerominek et al.
patent: 2002/0052392 (2002-05-01), Day et al.
patent: 2002/0056898 (2002-05-01), Lopes et al.
patent: 2002/0056900 (2002-05-01), Liu et al.
patent: 2002/0057565 (2002-05-01), Seo
patent: 2002/0063322 (2002-05-01), Robbins et al.
patent: 2002/0070931 (2002-06-01), Ishikawa
patent: 2002/0075551 (2002-06-01), Daneman
patent: 2002/0075555 (2002-06-01), Miles
patent: 2002/0119724 (2002-08-01), Hammel
patent: 2002/0126364 (2002-09-01), Miles
patent: 2002/0149096 (2002-10-01), Liebeskind
patent: 2002/0160583 (2002-10-01), Song
patent: 2002/0187254 (2002-12-01), Ghosh
patent: 2003/0043157 (2003-03-01), Miles
patent: 2003/0054588 (2003-03-01), Patel et al.
patent: 2003/0062186 (2003-04-01), Boroson et al.
patent: 2003/0072070 (2003-04-01), Miles
patent: 2003/0075794 (2003-04-01), Felton et al.
patent: 2003/0103185 (2003-06-01), Kim et al.
patent: 2003/0108306 (2003-06-01), Whitney et al.
patent: 2003/0121418 (2003-07-01), Loop et al.
patent: 2003/0122137 (2003-07-01), Hashimoto
patent: 2003/0138656 (2003-07-01), Sparks
patent: 2003/0144034 (2003-07-01), Hack et al.
patent: 2003/0152872 (2003-08-01), Miles
patent: 2003/0160021 (2003-08-01), Platt et al.
patent: 2003/0161126 (2003-08-01), Wilkinson et al.
patent: 2003/0184412 (2003-10-01), Gorrell
patent: 2004/0051929 (2004-03-01), Sampsell et al.
patent: 2004/0061492 (2004-04-01), Lopes et al.
patent: 2004/0066258 (2004-04-01), Cohn et al.
patent: 2004/0076008 (2004-04-01), Ikeda
patent: 2004/0100677 (2004-05-01), Huibers et al.
patent: 2004/0122175 (2004-06-01), Hekal
patent: 2004/0140557 (2004-07-01), Sun et al.
patent: 2004/0150319 (2004-08-01), Tomimatsu et al.
patent: 2004/0163472 (2004-08-01), Nagahara
patent: 2004/0166603 (2004-08-01), Carley
patent: 2004/0173886 (2004-09-01), Carley
patent: 2004/0183990 (2004-09-01), Guang et al.
patent: 2004/0184133 (2004-09-01), Su et al.
patent: 2004/0189195 (2004-09-01), Allemand
patent: 2004/0213962 (2004-10-01), Bourdelais et al.
patent: 2004/0218251 (2004-11-01), Piehl et al.
patent: 2004/0259370 (2004-12-01), Bergman
patent: 2005/0002079 (2005-01-01), Novotny et al.
patent: 2005/0035699 (2005-02-01), Tsai
patent: 2005/0036095 (2005-02-01), Yeh et al.
patent: 2005/0036192 (2005-02-01), Lin et al.
patent: 2005/0042117 (2005-02-01), Lin
patent: 2005/0046919 (2005-03-01), Taguchi et al.
patent: 2005/0074919 (2005-04-01), Patel et al.
patent: 2005/0093134 (2005-05-01), Tarn
patent: 2005/0116924 (2005-06-01), Sauvante et al.
patent: 2005/0159028 (2005-07-01), Sweetland et al.
patent: 2005/0167795 (2005-08-01), Higashi
patent: 2005/0184304 (2005-08-01), Gupta et al.
patent: 2005/0195462 (2005-09-01), Lin
patent: 2005/0247477 (2005-11-01), Kothari et al.
patent: 2005/0253283 (2005-11-01), Dcamp et al.
patent: 2005/0254982 (2005-12-01), Cadeddu
patent: 2006/0029732 (2006-02-01), Kobrin et al.
patent: 2006/0065436 (2006-03-01), Gally et al.
patent: 2006/0066600 (2006-03-01), Palmateer
patent: 2006/0066935 (2006-03-01), Cummings et al.
patent: 2006/0067641 (2006-03-01), Palmateer et al.
patent: 2006/0067642 (2006-03-01), Tyger
patent: 2006/0076631 (2006-04-01), Palmateer et al.
patent: 2006/0076632 (2006-04-01), Palmateer et al.
patent: 2006/0076634 (2006-04-01), Palmateer et al.
patent: 2006/0076637 (2006-04-01), Gally et al.
patent: 2006/0076648 (2006-04-01), Gally et al.
patent: 2006/0077126 (2006-04-01), Kothari
patent: 2006/0077145 (2006-04-01), Floyd
patent: 2006/0

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