MEMs device with feedback control

Details MEMs device with feedback control MEMs device with feedback control

2006-06-13

2006-06-13

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S237000

Reexamination Certificate

active

07061660

ABSTRACT:
A MEMS device includes at least one movable member and an active device having at least one property affected by the location of the movable member with respect to the active device. A control circuit is used to limit movement of the movable member based on observation of the property affected by the active device.

REFERENCES:
patent: 2001/0055147 (2001-12-01), Little et al.
patent: 2003/0117690 (2003-06-01), Oda et al.
patent: 2004/0061925 (2004-04-01), Azarov et al.
patent: 2004/0184717 (2004-09-01), Koontz et al.

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