Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-07-05
2005-07-05
Schwartz, Jordan M. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S223100, C359S295000
Reexamination Certificate
active
06914709
ABSTRACT:
A method of forming a MEMS device includes providing a substructure including a base material and at least one conductive layer formed on a side of the base material, forming a dielectric layer over the at least one conductive layer of the substructure, defining an actuating area for the MEMS device on the dielectric layer, including depositing a conductive material on the dielectric layer and communicating the conductive material with the at least one conductive layer of the substructure through the dielectric layer, forming a sacrificial layer over the conductive material and the dielectric layer, including depositing silicon over the conductive material and the dielectric layer, and forming a substantially planar surface of the silicon, forming an actuating element over the sacrificial layer within the actuating area, including communicating the actuating element with the conductive material of the actuating area through the sacrificial layer, and substantially removing the sacrificial layer between the actuating element and the dielectric layer.
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Monroe Michael G.
Nikkel Eric L.
Potochnik Stephen J.
Szepesi Michele K.
Tomasco Richard P.
Hewlett--Packard Development Company, L.P.
Schwartz Jordan M.
Stultz Jessica
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