MEMS device having contact and standoff bumps and related...

Details MEMS device having contact and standoff bumps and related... MEMS device having contact and standoff bumps and related...

2005-04-05

2005-04-05

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S214100, C200S181000, C310S307000, C310S309000, C250S227220, C250S214100, C216S013000, C333S262000, C333S101000, C356S519000

Reexamination Certificate

active

06876482

ABSTRACT:
MEMS Device Having Contact and Standoff Bumps and Related Methods. According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves.

REFERENCES:
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patent: 5920391 (1999-07-01), Grasdepot et al.
patent: 6331257 (2001-12-01), Loo et al.
patent: 6483056 (2002-11-01), Hyman et al.
patent: 6504118 (2003-01-01), Hyman et al.
patent: 6522452 (2003-02-01), Wood
patent: 6538798 (2003-03-01), Miller et al.
patent: 6566617 (2003-05-01), Suzuki et al.
patent: 6639205 (2003-10-01), Hsu et al.

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