Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-05-08
2007-05-08
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S295000, C359S298000, C359S318000, C359S566000, C359S567000, C359S572000, C359S573000, C359S576000
Reexamination Certificate
active
11213135
ABSTRACT:
In one embodiment, a light modulator includes a substrate and a number of modulator elements disposed above and spaced apart from the substrate. Each modulator element has an optically active portion adapted to receive light incident thereon, and a support portion on either side of the active portion to support the modulator element above the substrate. The modulator elements include at least one deflectable modulator element. To shorten damping time, the deflectable modulator element has a lower surface in the support portion that is closer to the substrate than a lower surface under the optically active portion.
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Leung Omar S.
Payne Alexander P.
Lester Evelyn A.
Okamoto & Benedicto LLP
Silicon Light Machines Corporation
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