MEMS device having a recessed cavity and methods therefor

Details MEMS device having a recessed cavity and methods therefor MEMS device having a recessed cavity and methods therefor

2007-06-20

2010-11-02

Sugarman, Scott J (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S247000, C257S682000

Reexamination Certificate

active

07826127

ABSTRACT:
A microelectromechanical systems device having a transparent substrate joined to a planar backplate with a raised perimeter structure forming a recessed cavity or cell. The raised perimeter structure is formed by applying a first layer around the peripheral area of the backplate to form a recessed cell. A second layer is applied over the first layer. The first layer is thicker than the second layer. The thicker layer comprises a viscous material. A second layer is a thinner adhesive layer, and is applied over the thicker layer to join the backplate to the transparent substrate to encapsulate the microelectromechanical systems device formed on the transparent substrate.

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