Diffractive thin-film piezoelectric micromirror and method...

Direct view deformable mirror device

DMD pixel with small-rotated-moved via2 to reduce...

Dual reflecting type and transmitting type scanner

Dynamic reflector array and method of making the same

Electrically-programmable diffraction grating

Electrodisplacive actuated mirror array and method for the manuf

Electrodisplacive actuator for use in an actuated mirror array

Electromagnetic actuator, manufacturing method, and optical...

Electromagnetic micro actuator and method of manufacturing...

Electromagnetic scanning micro-mirror and optical scanning...

Electromagnetic scanning micro-mirror and optical scanning...

Electromagnetically actuated micromirror actuator and...

Electron gun activated grating light valve

Electrostatically actuated micro-electro-mechanical devices...

Electrostatically controlled beam steering device and method

Electrostrictive actuated mirror array

Feedback sensor for M.E.M.S. mirrors

Fiber based MEMS

Fiber based MEMS