Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent
1994-09-22
1997-12-09
Shafer, Ricky D.
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
359291, 359295, 359855, 359900, 310328, 310366, 29 2535, G02B 7182, G02B 2608, H01L 4108, H04R 1700
Patent
active
056966180
ABSTRACT:
An array of M.times.N electrodisplacive actuated mirrors for use in an optical projection system is assembled by way of: (a) preparing two identical ceramic wafers; (b) forming M identical trenches thereon; (c) interlocking and bonding together to form a ceramic block; (d) forming a composite ceramic structure from the ceramic block by polishing the top and bottom surfaces thereof; (e) providing M.times.N signal electrodes and M+1 bias electrodes; (f) mounting on an active matrix to thereby form an array of M.times.N actuators; (g) placing M+1 photoresistive segments; (h) preparing places for attaching platforms, to be formed thereon a light reflecting layer; (i) forming a light reflecting layer; (j) pattering the light reflecting layer, including the platform, into an array of M.times.N mirrors; and (k) removing the M+1 photoresistive segments to thereby form the array of M.times.N electrodisplacive actuated mirrors.
REFERENCES:
patent: 5159225 (1992-10-01), Um
patent: 5469302 (1995-11-01), Lim
patent: 5506720 (1996-04-01), Yoon
patent: 5550680 (1996-08-01), Yoon
patent: 5552923 (1996-09-01), Min
patent: 5585956 (1996-12-01), Lee et al.
Ji Jeong-Beom
Min Yong-Ki
Daewoo Electronics Co. Ltd.
Shafer Ricky D.
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