Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2005-05-24
2005-05-24
Robinson, Mark A. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C353S099000
Reexamination Certificate
active
06897991
ABSTRACT:
A digital micromirror device with an optimized beam dimple formed over the via2 to provide process margin by increasing the clearance between the beam and the address electrode, thus reducing shorting between the two. This approach assures that when the beam tilts, it will land on its tips prior to making contact between the beam and address electrode, which are at different potentials. Beam dimple optimization is controlled by the characteristics of the via2 located on the lower metal-3 layer of the device.
REFERENCES:
patent: 6323982 (2001-11-01), Hornbeck
patent: 6657759 (2003-12-01), Muller
Dodge Brian K.
Fletcher Mark K.
Huffman James D.
Brady III Wade James
Brill Charles A.
Robinson Mark A.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
LandOfFree
DMD pixel with small-rotated-moved via2 to reduce... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with DMD pixel with small-rotated-moved via2 to reduce..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and DMD pixel with small-rotated-moved via2 to reduce... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3407272