Electromagnetic scanning micro-mirror and optical scanning...

Details Electromagnetic scanning micro-mirror and optical scanning... Electromagnetic scanning micro-mirror and optical scanning...

2008-01-29

2008-01-29

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S198100, C359S214100

Reexamination Certificate

active

07324252

ABSTRACT:
An electromagnetic scanning micro-mirror is provided with a magnetic field generator for supplying a magnetic field, a mirror plate having a reflective plane and a frame structure attached to a rear surface of the reflective plane, a substrate to surround the mirror plate, a pair of torsion bars to connect the mirror plate to the substrate, and a magnetic substance provided at the rear surface of the reflective plane of the mirror plate and adapted to generate a drive force by interacting with the magnetic field supplied from the magnetic field generator, wherein the mirror plate performs a rotation operation about the torsion bars, which define the rotating axis of the mirror plate, by use of the drive force generated from the magnetic substance.

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