Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2004-09-28
2009-12-01
Pritchett, Joshua L (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S223100
Reexamination Certificate
active
07626745
ABSTRACT:
Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.
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An Seung-Do
Oh Min-Suk
Song Jong-Hyeong
Yun Sang Kyeong
Christensen O'Connor Johnson & Kindness PLLC
Pritchett Joshua L
Samsung Electro-Mechanics Co. Ltd.
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