Electrostrictive actuated mirror array

Details Electrostrictive actuated mirror array Electrostrictive actuated mirror array

1994-07-29

1996-12-17

Shafer, Ricky D.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359291, 359295, 359846, 359855, 359900, 310328, 310366, 29 2535, G02B 508, G02B 2608, H01L 4104, H04R 1700

Patent

active

055859569

ABSTRACT:
An array of M .times.N electrostrictive actuated mirrors for use in an optical projection system manufactured using the inventive method, comprising: an active matrix including a substrate and an array of M.times.N connecting terminals thereon; an array of M.times.N electrostrictive actuators, wherein each of the actuators includes an electrostrictive member having a top and a bottom surfaces, the top surface being separated by a trench thereby creating first top surface and a second top surface, a first electrode located on the bottom surface, a pair of second electrodes, each of the of second electrodes placed on the first and second top surfaces, respectively, and a pair of insulating layers, each covering the first and second top surface, respectively, including the second electrode placed thereon; an array of M.times.N hinges, wherein each of the M.times.N hinges is provided with a flat top surface and a bottom surface having a protrusion mounted on the top of each actuators; an array of M.times.N connecting terminals, wherein each of the connecting terminals is used for electrically connecting each of the first electrodes with the active matrix; and an array of M.times.N mirrors, wherein each of the M.times.N mirrors is mounted on the top surface of each of the M.times.N hinges.

REFERENCES:
patent: 4248504 (1981-02-01), Albertinetti et al.
patent: 4662746 (1987-05-01), Hornbeck
patent: 4707081 (1987-11-01), Mir
patent: 4793699 (1988-12-01), Tokuhara
patent: 5061049 (1991-10-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5085497 (1992-02-01), Um et al.
patent: 5159225 (1992-10-01), Um
patent: 5170283 (1992-12-01), O'Brien et al.
patent: 5193256 (1993-03-01), Ochiai et al.
patent: 5212582 (1993-05-01), Nelson
patent: 5245464 (1993-09-01), Jensen
patent: 5469302 (1995-11-01), Lim
patent: 5506720 (1996-04-01), Yoon

Affiliated with

Also associated with

Rating

Electrostrictive actuated mirror array does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostrictive actuated mirror array, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostrictive actuated mirror array will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1996425