Electrostatically actuated micro-electro-mechanical devices...

Details Electrostatically actuated micro-electro-mechanical devices... Electrostatically actuated micro-electro-mechanical devices...

2005-06-28

2005-06-28

Epps, Georgia (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S290000, C359S874000, C073S504090

Reexamination Certificate

active

06912078

ABSTRACT:
One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structures for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes for electrostatically actuated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed to MEMS mirror array packaging. Other embodiments are directed to electrostatically actuated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structures in MEMS devices. Other embodiments are directed to methods of depositing a thin film on the back of a MEMS device.

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