Electromagnetic micro actuator and method of manufacturing...

Details Electromagnetic micro actuator and method of manufacturing... Electromagnetic micro actuator and method of manufacturing...

2007-02-26

2009-11-10

Mullins, Burton (Department: 2834)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C335S222000, C359S198100, C359S223100

Reexamination Certificate

active

07616365

ABSTRACT:
A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

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