Electrostatically controlled beam steering device and method

Details Electrostatically controlled beam steering device and method Electrostatically controlled beam steering device and method

1992-03-04

1993-05-18

Ben, Loha

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359214, 359291, 359846, 358206, 34081504, G02B 2608

Patent

active

052125823

ABSTRACT:
A device for steering light and its method of manufacture are disclosed. The device in the preferred embodiment consists of a multi-layer structure on a substrate. The substrate contains at least one electrode (36) for addressing a deflectable element (16) causing it to deflect towards the activated electrode (36). Upon the deflectable element (16) is at least one support post (62) which is positioned approximately along the axis of rotation (24) of the deflectable element (16). A reflecting element (61) is supported by the post (62) and deflects as the first element (16) deflects. The second element (62) is of far greater extent than the first element (16). Additionally, the method of manufacture of such a device is disclosed.

REFERENCES:
patent: 4317611 (1982-03-01), Petersen
patent: 4356730 (1982-11-01), Cade
patent: 4421381 (1983-12-01), Ueda et al.
patent: 4662746 (1987-05-01), Hornbeck
patent: 5018256 (1991-05-01), Hornbeck
patent: 5061049 (1991-10-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck

Affiliated with

Also associated with

Rating

Electrostatically controlled beam steering device and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatically controlled beam steering device and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatically controlled beam steering device and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-807924