Electrically-programmable diffraction grating

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

359225, 359291, 359295, 359573, G02B 2600, G02B 518

Patent

active

057575363

ABSTRACT:
An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometers (e.g. correlation and scanning spectrometers).

REFERENCES:
patent: 3752563 (1973-08-01), Torok et al.
patent: 3861784 (1975-01-01), Torok
patent: 4011009 (1977-03-01), Lama et al.
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4698602 (1987-10-01), Armitage
patent: 4736132 (1988-04-01), Culp
patent: 5061049 (1991-10-01), Hornbeck
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5115344 (1992-05-01), Jaskie
patent: 5142405 (1992-08-01), Hornbeck
patent: 5233456 (1993-08-01), Nelson
patent: 5311360 (1994-05-01), Bloom
patent: 5312513 (1994-05-01), Florence et al.
patent: 5331454 (1994-07-01), Hornbeck
patent: 5497262 (1996-03-01), Kaeriyama
patent: 5552924 (1996-09-01), Tregilas
patent: 5579151 (1996-11-01), Cho
J. H. Jerman, et al., "A Miniature Fabry-Perot Interferometer with a corrugated Silicon Diaphragm Support", Sensors and Actuators A, (29) pp. 151-158, no month 1991.
K. E. Petersen, "Micromechanical Light Modulator Array Fabricated on Silicon," Applied Physics Letters, vol. 31, pp. 521-523, 15 Oct. 1977.
L. J. Hornbeck, "Deformable-Mirror Spatial Light Modulators," Society of Photoinstrumentation Engineers Critical Reviews of Optical Science and Technology, vol. 1150, pp. 86-102, 1989. No Month.
J. H. Jerman and D. J. Clift, "Miniature Fabry-Perot Interferometers Micromachined in Silicon for Use in Optical Fiber WDM Systems," IEEE 1991 International Conference on Solid-State Sensors and Actuators Digest of Technical Papers, pp. 372-375, 1991. No Month.
R. M. Boysel, "A 128 x 128 Frame-Addressed Deformable Mirror Spatial Light Modulator," Optical Engineering, vol. 30, No. 9 pp. 1422-1427, Sep. 1991.
O. Solgaard, F.S.A. Sandejas, and D. M. Bloom, "Deformable Grating Optical Modulator," Optics Letters, vol. 17, No. 9 pp. 688-690, May 1, 1992.
Y. B. Gianchandani and K. Najafi, "A Bulk Dissolved Wafer Process for Microelectromechanical Devices," Journal of Microelectromechanical Systems, vol. 1, No. 2, pp. 77-85, Jun. 1992.
W. C. Tang, M. G. Lim and R. T. Howe, "Electrostatic Comb Drive Levitation and Control Method," Journal of Microelectromechanical Systems, vol. 1, No. 4, pp. 170-178, Dec. 1992.
M.A. Huff, A. D. Nikolich, and M. A. Schmidt, "Design of Sealed Cavity Microstructures Formed by Silicon Wafer Bonding," Journal of Microelectromechanical Systems, vol. 2, No. 2, pp. 74-81, Jun. 1993.
Y. Zhang and K. D. Wise, "Performance of Non-Planar Silicon Diaphragms Under Large Deflections," Journal of Microelectromechanical Systems, vol. 3, No. 2, pp. 59-68, Jun. 1994.
V. Temesvary, S., Wu, W. H. Hsieh, Y.-C. Tai, and D. K. Miu, "Design, Fabrication, and Testing of Silicon Microgimbals for Super-Compact Rigid Disk Drives," Journal of Microelectromechanical Systems, vol. 4, No. 1, pp. 18-27, Mar. 1995.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Electrically-programmable diffraction grating does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrically-programmable diffraction grating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrically-programmable diffraction grating will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1969173

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.