Single piece torsional hinged device with central spines and...

Single torsional hinge mirror

Snap down pivoting optical element

Snap-down pivoting optical element

Spatial light modulator and method

Spatial light modulator and method

Spatial optical modulator with passivation layer

Speckle reduction for display system with electromechanical...

Stabilizer for MEMS devices having deformable elements

Staggered torsional electrostatic combdrive and method of...

Staring scanner

Stationary coil oscillator scanning system

Support posts for micro-mechanical devices

Support posts for micro-mechanical devices

Surface micromachined optical system with reinforced mirror...

Surface micromachined optical system with reinforced mirror...

Surface micromachined optical system with reinforced mirror...

Surface micromachined optical system with reinforced mirror...

Suspension for maintaining mirror flatness of a MEMS device...

Swing member device, and optical deflector and image-forming...