Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2006-07-18
2006-07-18
Robinson, Mark A. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C310S309000
Reexamination Certificate
active
07079299
ABSTRACT:
A staggered torsional electrostatic combdrive includes a stationary combteeth assembly and a moving combteeth assembly with a mirror and a torsional hinge. The moving combteeth assembly is positioned entirely above the stationary combteeth assembly by a predetermined vertical displacement during a combdrive state. A method of fabricating the staggered torsional electrostatic combdrive includes the step of deep trench etching a stationary combteeth assembly in a first wafer. A second wafer is bonded to the first wafer to form a sandwich including the first wafer, an oxide layer, and the second wafer. A moving combteeth assembly is formed in the second wafer. The moving combteeth assembly includes a mirror and a torsional hinge. The moving combteeth assembly is separated from the first wafer by the oxide layer. The oxide layer is subsequently removed to release the staggered torsional electrostatic combdrive.
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Conant Robert A.
Lau Kam-Yin
Muller Richard S.
Nee Jocelyn T.
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