Single torsional hinge mirror

Details Single torsional hinge mirror Single torsional hinge mirror

2006-07-04

2006-07-04

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S224200, C359S291000

Reexamination Certificate

active

07072089

ABSTRACT:
The present invention provides a single torsional hinge device, such as a mirror, adapted for use as a pivoting mirror and preferably a pivoting mirror oscillating at a resonant frequency about the single hinge. The single torsional hinge mirror reduces or substantially eliminates stresses on the torsional hinge mirrors caused by mismatched mounting levels of the support structure and/or differences of the coefficient and thermal expansion of materials in the mirror and support structures. The mirror may include a single layer of silicon having a reflective surface or may be a multilayered mirror wherein silicon is used for the torsional hinges and support and silicon or other materials may be used as the reflecting surface.

REFERENCES:
patent: 6069725 (2000-05-01), Melville
patent: 6956684 (2005-10-01), Orcutt
patent: 2004/0027449 (2004-02-01), Turner et al.
Ikeda, M., et al., “PZT Thin-Film Actuator Driven Micro Optical Scanning Sensor By 3D Integration of Optical and Mechanical Devices,” 1999 IEEE, pp. 435-440.

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