Stabilizer for MEMS devices having deformable elements

Details Stabilizer for MEMS devices having deformable elements Stabilizer for MEMS devices having deformable elements

2008-12-27

2011-11-15

Choi, William (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S290000

Reexamination Certificate

active

08059323

ABSTRACT:
A stabilizer mechanism is coupled to a deformable element of a microelectromechanical device for reducing unwanted deformation of the deformable element by increasing the stiffness of the deformable element in selected other directions than the direction along which desired deformation is performed.

REFERENCES:
patent: 6552991 (2003-04-01), Ishioka et al.
patent: 6600591 (2003-07-01), Anderson et al.
patent: 7117068 (2006-10-01), Critchlow
patent: 7173747 (2007-02-01), Yasuda et al.

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