Spatial optical modulator with passivation layer

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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C359S291000, C359S847000

Reexamination Certificate

active

07468825

ABSTRACT:
Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.

REFERENCES:
patent: 6375329 (2002-04-01), Yokoyama et al.
patent: 2005/0063038 (2005-03-01), Filhol

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