Spatial light modulator and method

Details Spatial light modulator and method Spatial light modulator and method

1992-04-16

1992-12-15

Lerner, Martin

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

358233, 359230, 359291, 359846, 359855, G02B 7198, G02F 129

Patent

active

051722623

ABSTRACT:
An electrostatically deflectable beam spatial light modulator with the beam composed of two layers of aluminum alloy and the hinge connecting the beam to the remainder of the alloy formed in only one of the two layers; this provides a thick stiff beam and a thin compliant hinge. The alloy is on a spacer made of photoresist which in turn is on a semiconductor substrate. The substrate contains addressing circuitry in a preferred embodiment.

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