Support posts for micro-mechanical devices

Details Support posts for micro-mechanical devices Support posts for micro-mechanical devices

1995-06-07

1997-07-08

Dzierzynski, Paul M.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359223, 359291, 359846, G02B 2608, G02B 2600, G02B 508

Patent

active

056467680

ABSTRACT:
An improved support post (16, 23, 25) for micro-mechanical devices (10). A via (34a) that defines the outer surface of the support post (16) is etched into a spacer layer (34). An oxide layer (41) is conformally deposited over the spacer layer (34) and into the via (34a), and then etched back to the top surface of the spacer layer (34), leaving a sidewall ring (23a) on the inner surface of the via (34a). Next, a metal layer (61) is deposited over the spacer layer (34) and into the via (34a) so as to cover the sidewall ring (23a). This metal layer (61) is then etched to form a support post stem (23) inside the via (34a). The spacer layer (34) is removed, leaving the support post stem (23) and a sidewall ring (23a) around the stem (23).

REFERENCES:
patent: 4592628 (1986-06-01), Altman et al.
patent: 4710732 (1987-12-01), Hornbeck
patent: 4793699 (1988-12-01), Tokuhara
patent: 5202785 (1993-04-01), Nelson
patent: 5387924 (1995-02-01), Gale, Jr. et al.
patent: 5392151 (1995-02-01), Nelson
patent: 5506171 (1996-04-01), Leonard et al.

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