Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2007-04-26
2009-11-17
Cherry, Euncha P (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
Reexamination Certificate
active
07619802
ABSTRACT:
Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.
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Bowman David R.
Brown Dean R.
Davis Wyatt O.
Tauscher Jason B.
Cherry Euncha P
Microvision Inc.
Wills Kevin D.
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