Single piece torsional hinged device with central spines and...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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C359S198100, C359S199200, C359S210100

Reexamination Certificate

active

07417779

ABSTRACT:
A torsional hinged device having an optical surface, such as a mirror or refractive surface, formed from a single piece of silicon with reduced flexing. In addition to central spines to prevent or reduce flexing of the tips of the optical surface, the device may also include perimeter ridges to further reduce or prevent flexing as well as reduce warping of the edges of the optical surface. To allow balancing of the device so that the center of mass of the assembly is on the pivoting axis, a recess is formed in the back portion to receive a permanent drive/sense magnet.

REFERENCES:
patent: 6956684 (2005-10-01), Orcutt
patent: 7050211 (2006-05-01), Orcutt

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