Spatial light modulator and method

Details Spatial light modulator and method Spatial light modulator and method

1990-09-13

1991-10-29

Moskowitz, Nelson

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

358206, 359213, 359298, 359847, G02F 127, B44C 122, H04N 574, G02B 2608

Patent

active

050610490

ABSTRACT:
An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.

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patent: 4710732 (1987-12-01), Hornbeck
patent: 4793699 (1988-12-01), Tokuhara
patent: 4831614 (1989-05-01), Duerig et al.

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