Method for fabricating a DMD spatial light modulator with a hard

Details Method for fabricating a DMD spatial light modulator with a hard Method for fabricating a DMD spatial light modulator with a hard

1995-01-31

1996-04-02

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359224, 359230, 359900, 427523, 348770, G02B 2608

Patent

active

055046142

ABSTRACT:
A method of fabricating a digital micromirror device (DMD) (10) spatial light modulator (SLM) with a hardened superstructure hinge (16). The invention comprises strengthening a hinge layer material (36) by ion implantation before etching the hinge layer material (36) to form the hinge (16), but could be implanted after etching the hinge (16). The ion implantation is applied with a predetermined energy to concentrate the implanted material (62) at the center of the hinge layer material (36). The entire process is performed using conventional robust semiconductor processes, at low temperatures. Through ion implantation, the DMD hinge (16) is strengthened to minimize or eliminate the possibility of creep. A combination of ions could be implanted if desired. The ion chosen is based on the solubility of the hinge material.

REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5105369 (1992-04-01), Nelson
patent: 5278652 (1994-01-01), Urbanus
Ser. No. 08/268,741, Knipe et al., filing date Jun. 30, 1994.
Ser. No. 08/283,496, Kaeriyama, filing date Jul. 29, 1994.

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