Method for manufacturing an electrodisplacive actuated mirror ar

Details Method for manufacturing an electrodisplacive actuated mirror ar Method for manufacturing an electrodisplacive actuated mirror ar

1994-09-27

1996-04-09

Shafer, Ricky D.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359291, 359846, 359855, 359900, 310328, 310366, 29 2535, G02B 508, G02B 2600, H01L 4104, H04R 1700

Patent

active

055067204

ABSTRACT:
An array of M.times.N electrodisplacive actuated mirrors for use in an optical projection system is assembled by way of: (a) preparing a ceramic wafer made of an electrodisplacive material, having a top and a bottom surfaces; (b) providing on the bottom surface of the ceramic wafer an array of M.times.N first electrodes; (c) forming a first metallization on the top surface thereof; (d) mask bonding; (e) forming an array of M.times.N actuating members by providing M trenches thereon using a sandblasting method; (f) mounting the ceramic wafer on an active matrix; (g) mask removing; (h) forming a second metallization; (i) providing a first photoresistive layer; (j) electroforming; (k) removing the first photoresistive layer; (l) providing a second photoresistive layer; (m) forming a platform with a flat top surface; (n) providing a light reflecting layer; (o) pattern the light reflecting layer, including the platform, into an array of M.times.N mirrors; and (p) removing the second photoresist layer to thereby form an array of M.times.N electrodisplacive actuated mirrors.

REFERENCES:
patent: 5083857 (1992-01-01), Hornbeck
patent: 5085497 (1992-02-01), Um et al.
patent: 5159225 (1992-10-01), Um
patent: 5212582 (1993-05-01), Nelson

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