Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2011-03-15
2011-03-15
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S290000, C359S291000, C359S292000, C359S295000, C359S298000, C345S085000, C345S108000, C348S770000, C348S771000
Reexamination Certificate
active
07907319
ABSTRACT:
An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.
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patent
Knobbe Martens Olson & Bear LLP
Lester Evelyn A.
QUALCOMM MEMS Technologies Inc.
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