Method to improve ability to perform CMP-assisted liftoff...
Method to improve uniformity and reduce excess undercuts during
Method to make a high data rate stitched writer for a giant...
Method to make gas permeable shell for MEMS devices with...
Method to prevent adhesion of micromechanical structures
Method to produce masking
Method to reduce stacking fault nucleation sites and reduce...
Method to reduce stacking fault nucleation sites and reduce...
Method to remove metals in a scrubber
Method using block copolymers for making a master mold with...
Method utilizing a magnetic assembly during etching thin...
Methodologies to reduce process sensitivity to the chamber...
Methodology for in situ etch stop detection and control of plasm
Methods and apparatus for controlled partial ashing in a variabl
Methods and apparatus for controlling ion energy and plasma...
Methods and apparatus for determining an etch endpoint in a...
Methods and apparatus for etching a nitride layer in a...
Methods and apparatus for etching semiconductor wafers and layer
Methods and apparatus for forming submicron patterns on films
Methods and apparatus for forming submicron patterns on films