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Method to improve ability to perform CMP-assisted liftoff...

Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate

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Method to improve uniformity and reduce excess undercuts during

Etching a substrate: processes – Forming or treating electrical conductor article
Patent

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Method to make a high data rate stitched writer for a giant...

Etching a substrate: processes – Forming or treating article containing magnetically...
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Method to make gas permeable shell for MEMS devices with...

Etching a substrate: processes – Etching to produce porous or perforated article
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Method to prevent adhesion of micromechanical structures

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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Method to produce masking

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Method to reduce stacking fault nucleation sites and reduce...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method to reduce stacking fault nucleation sites and reduce...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method to remove metals in a scrubber

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Method using block copolymers for making a master mold with...

Etching a substrate: processes – Forming or treating an article whose final configuration has...
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Method utilizing a magnetic assembly during etching thin...

Etching a substrate: processes – Forming or treating mask used for its nonetching function
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Methodologies to reduce process sensitivity to the chamber...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Methodology for in situ etch stop detection and control of plasm

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Patent

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Methods and apparatus for controlled partial ashing in a variabl

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating resistive material
Patent

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Methods and apparatus for controlling ion energy and plasma...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Methods and apparatus for determining an etch endpoint in a...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Methods and apparatus for etching a nitride layer in a...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Methods and apparatus for etching semiconductor wafers and layer

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Patent

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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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