Method to improve ability to perform CMP-assisted liftoff...

Etching a substrate: processes – Forming or treating article containing magnetically...

Reexamination Certificate

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C216S037000, C216S040000, C216S042000, C438S692000, C438S697000, C029S603060, C029S013000, C029S603140, C029S603180, C360S324100

Reexamination Certificate

active

11081222

ABSTRACT:
A method is presented for fabricating a read head having a read head sensor and a hard bias/lead layer which includes depositing a strip of sensor material in a sensor material region, and depositing strips of fast-milling dielectric material in first and second fast-milling dielectric material regions adjacent to the sensor material region. A protective layer and a layer of masking material is deposited on the strip of sensor material and the strips of fast-milling dielectric material to provide masked areas and exposed areas. A shaping source, such as an ion milling source, is provided which shapes the exposed areas. Hard bias/lead material is then deposited on the regions of sensor material and fast-milling dielectric material to form first and second leads and a cap on each of these regions. The cap of hard bias/lead material and the masking material is then removed from each of these regions.

REFERENCES:
patent: 6085406 (2000-07-01), Garfunkel et al.
patent: 6176005 (2001-01-01), Garfunkel et al.
patent: 6958885 (2005-10-01), Chen et al.
patent: 2004/0105195 (2004-06-01), Fontana, Jr. et al.
patent: 2006/0067009 (2006-03-01), Cyrille et al.
IPCOM13530D: Fabrication of self-aligned side-by-side read/write head by using selective dry etching, no date.

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