Integrated post-etch treatment for a dielectric etch process
Method and compositions for hardening photoresist in etching...
Method for fine patterning of a polymeric film
Method for forming a micro-pattern on a substrate
Method of protecting silicon wafers during wet chemical etching
Methods of etching silicon-oxide-containing compositions
Methods of reducing photoresist distortion while etching in...
Plasma etching using polycarbonate mask and low pressure-high de
Plasma etching using polycarbonate mask and low-pressure...
Polymer-based micromachining for microfluidic devices
Shadow mask, a method of forming the shadow mask, and a...
Ultrafine pattern forming method and ultrafine etching method us
Vapor HF etch process mask and method
Vapor HF etch process mask and method