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Electrostatic chuck and substrate processing apparatus

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck and substrate temperature control fixing...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck and the method of operating the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck apparatus and method for efficiently...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck assembly

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck assembly

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck assembly having disassembling device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck assembly with dielectric material and/or...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck bonded to base with a bond layer and method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck capable of rapidly dechucking a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck electrical balancing circuit repair

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck employing thermoelectric cooling

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck for an electrically insulative...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck for holding wafer

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic chuck for ion injector

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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