Electrostatic chuck and substrate temperature control fixing...

Details Electrostatic chuck and substrate temperature control fixing... Electrostatic chuck and substrate temperature control fixing...

2009-06-11

2011-11-29

Salce, Patrick (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C361S233000, C361S231000

Reexamination Certificate

active

08068326

ABSTRACT:
There is provided an apparatus including: an electrostatic chuck for holding an object; and a base plate which supports the electrostatic chuck and controls a temperature of the electrostatic chuck. The electrostatic chuck is fixed onto the base plate via an adhesive layer. The electrostatic chuck includes: a base; an electrostatic electrode built in the base; and a mounting portion containing a dielectric material and detachably mounted on the base. The object is mounted on the mounting portion.

REFERENCES:
patent: 6373679 (2002-04-01), Qiao et al.
patent: 7352555 (2008-04-01), Handa et al.
patent: 7623334 (2009-11-01), Mizuno et al.
patent: 7848077 (2010-12-01), Mizuno et al.
patent: 2003/0030960 (2003-02-01), Kanno et al.
patent: 2003/0102087 (2003-06-01), Ito et al.
patent: 2008/0174930 (2008-07-01), Hattori et al.
patent: 2000-317761 (2000-11-01), None
patent: 2000-332091 (2000-11-01), None

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