Electrostatic chuck device

Details Electrostatic chuck device Electrostatic chuck device

2005-10-27

2010-10-26

Fureman, Jared J (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

Reexamination Certificate

active

07821767

ABSTRACT:
The object of this invention is to provide that an electrostatic chuck device which can properly and promptly diselectrify a substrate to be processed.In an electrostatic chuck device (11) attracting a substrate (W) to be processed on the surface of a susceptor (12) electrically, a diselectrifying circuit is provided which includes diselectrifying electrode means (16) facing the surface of the susceptor (12), a diselectrifying potential (19), and a diselectrifying resistance (17) connected between the diselectrifying electrode means (16) and the diselectrifying potential (19). The resistance value of the diselectrifying resistance (178) is established such that it is lower than that of an insulating layer (13) of the surface of the susceptor (12and the diselectrifying resistance (17) can hold the potential of the substrate (W) during an electrostatic chuck operation, and such that the diselectrifying resistance17) can dissipate the potential of the substrate (W) into the ground potential (19) when the electrostatic chuck is canceled. This structure can appropriately and promptly diselectrify the substrate (W).

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