Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1997-12-02
1999-05-04
Fleming, Fritz
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
059010304
ABSTRACT:
An electrostatic chuck employs thermoelectric cooling technology. The chuck includes a conductive circular base with an upper ring portion forming a first pole piece electrically isolated from an annular portion forming a second pole piece. The upper surface of the pole pieces have a dielectric material formed thereon and together form the electrostatic clamping surface for an article to be held thereon. The backside is provided with an annular recess containing a plurality of thermoelectric devices or modules and intervening spokes. The devices are covered with a heat sink or cooling plate through which a fluid such as water is circulated. A retaining back ring covers the water plate which is secured to the base by bolts. Uniform pressure is applied to the water plate and modules by means of spring washers inserted between back ring and water plate.
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Logan Joseph
Tompkins Robert
Dorsey Gage, Inc.
Fleming Fritz
Spiegel Joseph L.
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