Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2007-04-24
2007-04-24
Jackson, Stephen W. (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
Reexamination Certificate
active
10857068
ABSTRACT:
An electrostatic chuck for attracting an insulative substrate to be processed, the electrostatic chuck comprising a dielectric layer having a first surface which attracts an insulative substrate, and a second surface on which are provided a plurality of electrodes, and an insulative support base plate fixing said dielectric layer. A distance between adjacent ones of the electrodes and the thickness of the dielectric layer are adjusted such that when a potential difference is established between the electrodes, a non-uniform electric field is formed in which the insulative substrate is partially polarized and attracted to the first surface by gradient force.
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Fuwa Koh
Hori Hiroaki
Kitabayashi Tetsuo
Maehara Ken
Tateno Noriaki
Benenson Boris
Blackman William D.
Carrier Joseph P.
Carrier Blackman & Associates P.C.
Jackson Stephen W.
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