Electrostatic chuck capable of rapidly dechucking a substrate

Details Electrostatic chuck capable of rapidly dechucking a substrate Electrostatic chuck capable of rapidly dechucking a substrate

1997-12-01

1999-03-09

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, H02N 1300

Patent

active

058809244

ABSTRACT:
An electrostatic chuck 20 for holding a substrate 12 comprises a dielectric 70 having a receiving surface 75 for receiving the substrate thereon. The dielectric 70 comprises a charging electrode 80 for generating electrostatic charge for electrostatically holding the substrate 12 to the receiving surface 75, and a discharge electrode 85 electrically isolated from the charging electrode for removing electrostatic charge accumulated in the chuck 20.

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