Electrostatic chuck electrical balancing circuit repair

Details Electrostatic chuck electrical balancing circuit repair Electrostatic chuck electrical balancing circuit repair

2008-09-05

2011-11-22

Barnie, Rexford (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C279S128000

Reexamination Certificate

active

08064185

ABSTRACT:
The present invention includes methods and apparatus for repairing an electrical connection between bipolar electrodes contained within an electrostatic chuck and a conductive mask disposed atop the electrostatic chuck, known as a balancing circuit. Embodiments of the invention are particularly useful after removal of an electrostatic chuck for refurbishment.

REFERENCES:
patent: 5656093 (1997-08-01), Burkhart et al.
patent: 5908334 (1999-06-01), Chen et al.
patent: 6462928 (2002-10-01), Shamouilian et al.
patent: 6535372 (2003-03-01), Parkhe et al.
patent: 6853533 (2005-02-01), Parkhe et al.
patent: 2002/0050246 (2002-05-01), Parkhe
Office Action dated May 11, 2011 for Korean Patent Application No. 10-2009-0083974.

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