Electrostatic chuck assembly having disassembling device

Details Electrostatic chuck assembly having disassembling device Electrostatic chuck assembly having disassembling device

2006-09-05

2006-09-05

Vu, Phuong T. (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

Reexamination Certificate

active

07102871

ABSTRACT:
A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ceramic element. The disassembling device includes a main body and at least one pushing element. The main body is disposed on the second end surface and has a through hole. The at least one pushing element penetrates the through hole and pushes against the ceramic element and pedestal to separate the ceramic element and pedestal from the first end surface of the base.

REFERENCES:
patent: 5300175 (1994-04-01), Gardner et al.
patent: 5874361 (1999-02-01), Collins et al.
patent: 5885428 (1999-03-01), Kogan
patent: 6116990 (2000-09-01), Sinclair et al.

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