Corona charger for image transfer
Corona discharge poling process
Corrosion resistant electrostatic chuck
Cover layer for a substrate support chuck and method of fabricat
Creating surface topography on an electrostatic chuck with a man
Dechucking method and apparatus for workpieces in vacuum...
Deformable micro-actuator
Deformable micro-actuator with grid electrode
Detachable electrostatic chuck for supporting a substrate in...
Device for electrostatically suspending a body or sample
Dielectric covered electrostatic chuck
Dual bias frequency plasma reactor with feedback control of...
Dual bias frequency plasma reactor with feedback control of...
Dynamic feedback electrostatic wafer chuck
Electric discharge machining apparatus
Electrical treatment of textile yarn or fibers
Electro adhesion device
Electroadhesion
Electrostastic chuck
Electrostatic actuation control system