Detachable electrostatic chuck for supporting a substrate in...

Details Detachable electrostatic chuck for supporting a substrate in... Detachable electrostatic chuck for supporting a substrate in...

2011-03-15

2011-03-15

Jackson, Stephen W (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C361S233000, C361S230000

Reexamination Certificate

active

07907384

ABSTRACT:
A substrate support has an electrostatic chuck comprising an electrostatic puck with a dielectric covering an electrode capable of being charged to energize a process gas. The chuck has a frontside surface to receive a substrate and a base plate having an annular flange. A spring loaded heat transfer plate contacts the base plate, and has a fluid channel comprising first and second spiral channels. A pedestal is below the heat transfer plate.

REFERENCES:
patent: 3586343 (1971-06-01), Reed
patent: 4090851 (1978-05-01), Berkman et al.
patent: 4180723 (1979-12-01), Szupillo
patent: 4184188 (1980-01-01), Briglia et al.
patent: 4384918 (1983-05-01), Abe
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 4902025 (1990-02-01), Zimdars
patent: 5155652 (1992-10-01), Logan et al.
patent: 5191506 (1993-03-01), Logan et al.
patent: 5213349 (1993-05-01), Elliott
patent: 5257653 (1993-11-01), Nimberger
patent: 5280156 (1994-01-01), Niori et al.
patent: 5376213 (1994-12-01), Ueda et al.
patent: 5436790 (1995-07-01), Blake et al.
patent: 5460684 (1995-10-01), Saeki et al.
patent: 5478429 (1995-12-01), Komino et al.
patent: 5527584 (1996-06-01), Darfler et al.
patent: 5529657 (1996-06-01), Ishii
patent: 5581874 (1996-12-01), Aoki et al.
patent: 5600530 (1997-02-01), Smith
patent: 5606484 (1997-02-01), Kawada et al.
patent: 5625526 (1997-04-01), Watanabe et al.
patent: 5665260 (1997-09-01), Kawada et al.
patent: 5671116 (1997-09-01), Husain
patent: 5720818 (1998-02-01), Donde et al.
patent: 5729423 (1998-03-01), Donde et al.
patent: 5737178 (1998-04-01), Herchen
patent: 5745331 (1998-04-01), Shamouilian et al.
patent: 5796074 (1998-08-01), Edelstein et al.
patent: 5818693 (1998-10-01), Garner et al.
patent: 5822171 (1998-10-01), Shamouilian et al.
patent: 5827585 (1998-10-01), Giannetti
patent: 5844205 (1998-12-01), White et al.
patent: 5851298 (1998-12-01), Ishii
patent: 5858100 (1999-01-01), Maeda et al.
patent: 5870100 (1999-02-01), DeFreitas
patent: 5879100 (1999-03-01), Winkler
patent: 5886863 (1999-03-01), Nagasaki et al.
patent: 5886864 (1999-03-01), Dvorsky
patent: 5903428 (1999-05-01), Grimard et al.
patent: 5906684 (1999-05-01), Tamura et al.
patent: 5916370 (1999-06-01), Chang
patent: 5949650 (1999-09-01), Bulante et al.
patent: 5958813 (1999-09-01), Aida et al.
patent: 5978202 (1999-11-01), Wadensweiler et al.
patent: 5986747 (1999-11-01), Moran
patent: 5986875 (1999-11-01), Donde et al.
patent: 5994662 (1999-11-01), Murugesh
patent: 6009831 (2000-01-01), Hwang
patent: 6034863 (2000-03-01), Marohl et al.
patent: 6046758 (2000-04-01), Brown et al.
patent: 6048434 (2000-04-01), Tamura et al.
patent: 6072685 (2000-06-01), Herchen et al.
patent: 6074512 (2000-06-01), Collins et al.
patent: 6077357 (2000-06-01), Rossman et al.
patent: 6081414 (2000-06-01), Flanigan et al.
patent: 6094334 (2000-07-01), Bedi et al.
patent: 6108189 (2000-08-01), Weldon
patent: 6120661 (2000-09-01), Hirano et al.
patent: 6159055 (2000-12-01), Satitpunwaycha et al.
patent: 6181049 (2001-01-01), Streckert et al.
patent: 6215641 (2001-04-01), Busse et al.
patent: 6219219 (2001-04-01), Hausmann et al.
patent: 6310755 (2001-10-01), Kholodenko et al.
patent: 6376808 (2002-04-01), Tachikawa et al.
patent: 6423949 (2002-07-01), Chen et al.
patent: 6462928 (2002-10-01), Shamouilian et al.
patent: 6469283 (2002-10-01), Burkhart et al.
patent: 6490144 (2002-12-01), Narendrnath et al.
patent: 6490146 (2002-12-01), Wang et al.
patent: 6503131 (2003-01-01), Franklin et al.
patent: 6503368 (2003-01-01), Kholodenko
patent: 6503572 (2003-01-01), Waggoner et al.
patent: 6506291 (2003-01-01), Tsai et al.
patent: 6538872 (2003-03-01), Wang et al.
patent: 6552905 (2003-04-01), Herring et al.
patent: 6563686 (2003-05-01), Tsai et al.
patent: 6583980 (2003-06-01), Wang et al.
patent: 6630413 (2003-10-01), Todd
patent: 6646233 (2003-11-01), Kanno et al.
patent: 6700099 (2004-03-01), Cole et al.
patent: 6740853 (2004-05-01), Johnson et al.
patent: 6853533 (2005-02-01), Parkhe et al.
patent: 6907924 (2005-06-01), Moslehi
patent: 6918530 (2005-07-01), Shinkai et al.
patent: 6977804 (2005-12-01), Yanagida
patent: 7029529 (2006-04-01), Law et al.
patent: 7247819 (2007-07-01), Goto et al.
patent: 2001/0012604 (2001-08-01), Okase et al.
patent: 2002/0036881 (2002-03-01), Shamouilian et al.
patent: 2002/0050246 (2002-05-01), Parkhe et al.
patent: 2002/0075624 (2002-06-01), Wang et al.
patent: 2002/0081445 (2002-06-01), Kadomura et al.
patent: 2003/0010292 (2003-01-01), Kholodenko et al.
patent: 2005/0194374 (2005-09-01), Gelatos et al.
patent: 2005/0219786 (2005-10-01), Brown et al.
patent: 2006/0002053 (2006-01-01), Brown et al.
patent: 0 123 456 (1984-10-01), None
patent: 0 790 641 (1997-08-01), None
patent: 04-238882 (1992-08-01), None
patent: 09045757 (1997-02-01), None
patent: 10270540 (1998-10-01), None
patent: 11163109 (1999-06-01), None
patent: 11176919 (1999-07-01), None
patent: WO-99/25006 (1999-05-01), None
patent: WO-2008/048518 (2008-04-01), None
Office Action dated Apr. 24, 2006, U.S. Appl. No. 10/816,152 entitled “Detachable electrostatic chuck” (US).
Office Action dated Sep. 27, 2007, U.S. Appl. No. 10/816,152 entitled “Detachable electrostatic chuck” (US).
Final Office Action dated Apr. 30, 2008, U.S. Appl. No. 10/816,152 entitled “Detachable electrostatic chuck” (US).
Advisory Action dated Sep. 9, 2008, U.S. Appl. No. 10/816,152 entitled “Detachable electrostatic chuck” (US).
Office Action dated Mar. 10, 2009, U.S. Appl. No. 10/816,152 entitled “Detachable electrostatic chuck” (US).
Office Action dated Mar. 9, 2007, U.S. Appl. No. 11/221,169 entitled “Detachable electrostatic chuck for supporting a substrate in a . . . ”.
Office Action dated Oct. 9, 2007, U.S. Appl. No. 11/221,169 entitled “Detachable electrostatic chuck for supporting a substrate in a . . . ”.
Final Office Action dated May 29, 2008, U.S. Appl. No. 11/221,169 entitled “Detachable electrostatic chuck for supporting a substrate in . . . ”.
Office Action dated Nov. 4, 2005, Chinese Patent Application No. 200420115729.5 entitled “Detachable electrostatic chuck”, (China).
M Cubed Technologies, Inc., “Beams and Structural Members”, Beam Note, Rev. 03, Jul. 25, 2001, retrieved at Internet address www.mmmt.com/Beam.pdf.
IBM Technical Disclosure Bulletin, vol. 31, No. 1, Jun. 1988, pp. 462-464.

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