Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1994-01-31
1996-01-23
Gaffin, Jeffrey A.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
361230, H02N 1300
Patent
active
054869757
ABSTRACT:
A corrosion resistant electrostatic chuck 10 for holding a silicon wafer 18 during processing with a corrosive gas has an electrically insulative layer 12 thereon protected from corrosion by a guard 14. The insulative layer 12 has a top surface 20 covered by the silicon wafer 18 and an exposed side surface 16. The guard 14 substantially encloses the exposed side surface 16 of the insulative layer 12 and protects the insulative layer 12 from a corrosive gas. The guard 14 is made of sacrificial material that corrodes at least as fast as the insulative layer 12 corrodes when exposed to the corrosive gas. The sacrificial material positioned near the exposed side surface 16 corrodes and reduces the concentration of the corrosive gas at the exposed side surface 16, thereby reducing the rate of corrosion of the insulative layer 12.
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Shamouilian Shamouil
Tanase Yoshi
Applied Materials Inc.
Gaffin Jeffrey A.
Janah Ashok K.
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