Electrostatic sensing chuck using area matched electrodes
Electrostatic support assembly having an integral ion focus ring
Electrostatic wafer chuck, and charged-particle-beam...
Electrostatic wafer chucks and charged-particle-beam...
Electrostatic wafer clamp
Electrostatic wafer clamp
Electrostatic wafer clamp
Electrostatic wafer clamp having electrostatic seal for...
Electrostatic wafer clamp having low particulate contamination o
Electrostatically attracting electrode and a method of manufactu
Electrostatically attracting electrode and a method of...
Electrostatically screened, voltage-controlled electrostatic...
Energy transfer apparatus
Equipment for holding a semiconductor wafer, a method for...
Erosion resistant electrostatic chuck
Erosion resistant electrostatic chuck with improved cooling syst
Full area temperature controlled electrostatic chuck and...
Guard for electrostatic chuck
Guard ring electrostatic chuck
Guard ring electrostatic chuck