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Electrostatic sensing chuck using area matched electrodes

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic support assembly having an integral ion focus ring

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic wafer chuck, and charged-particle-beam...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic wafer chucks and charged-particle-beam...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic wafer clamp

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic wafer clamp

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic wafer clamp

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic wafer clamp having electrostatic seal for...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatic wafer clamp having low particulate contamination o

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatically attracting electrode and a method of manufactu

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatically attracting electrode and a method of...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electrostatically screened, voltage-controlled electrostatic...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Utility Patent

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Energy transfer apparatus

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Equipment for holding a semiconductor wafer, a method for...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Erosion resistant electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Erosion resistant electrostatic chuck with improved cooling syst

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Full area temperature controlled electrostatic chuck and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Guard for electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Guard ring electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reissue Patent

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Guard ring electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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